Film Thickness Measurement System

Using laser scanning, spectral confocal microscopy, capacitance method, eddy current method, photo-thermal method, and other measurement techniques, YZS Precision has developed various film thickness measurement systems. We offer mature measurement solutions for wet films, dry films, coatings, plating films, and more.

1. High-Precision Motion Platform

*XYZθ Multi-axis Combined Motion Solution

*Repeat positioning accuracy up to 0.1μm

*Automatic focusing function

*Automatic triggering of optical system for
image acquisition

We independently design and manufacture high-precision multi-axis motion platforms for film thickness measurement systems, with customizable motion range options.

2. Error Compensation Algorithms

*Geometric Error Compensation for Motion
Mechanisms

*Equipment Temperature Compensation

*Calibration Error Compensation

Professional compensation algorithms that address geometric errors in motion mechanisms, temperature variations, and calibration errors, achieving high precision.

3. Multiple Measurement Methods

*Spectral Confocal Method

*Laser Triangulation Method

*Capacitance Method

*Eddy Current Method

For different types of measured film materials, we employ different measurement methods. For transparent films, we use spectral confocal microscopy; for metal coatings, we utilize eddy current testing, etc.

4. Self-developed Motion Controller

*Multi-axis Motion Control

*Direct Input of Probe Data into Controller

*Support for EtherCAT Communication

*Support for Multiple Probe Connections

Probe data can be directly input into the
controller via EtherCAT protocol, significantly
enhancing real-time data acquisition from the
probes. Various commonly used probes can
be connected to the controller.

5. Thickness Measurement for Various Types of Films

*Metal Film Thickness Measurement

*Organic Compounds Film Thickness
Measurement

*In-process Measurement during Production

*Final Product Film Thickness Measurement
in Quality Control

The meatal film thickness measurement system was applied in the aerospace industry and achieves an accuracy of up to 1μm. In the nuclear industry, a polymer film thickness measurement system achieves an accuracy
of 0.5μm.

6. Coating and Plating Thickness
Measurement

*Ink coating thickness measurement on mobile
phone glass surfaces

*Plating thickness measurement on metal sheet
surfaces

*Paint thickness measurement on metal surfaces

*Coating thickness measurement on the surfaces of organic material sheets

Our ink coating thickness measurement system for Apple mobile phone glass surfaces achieves a precision of up to 0.6 μm. The plating thickness measurement system for nuclear industry cladding tubes achieves a precision of up to 1 μm.

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