3. Peformance Indicators
Probe Max.measuring range: 300um
Probe resolution: 10nm
Number of measurement channels: 3 or 5 channels
Sampling frequency: Max. 250kHz
Analog Signal Bandwidth: 20kHz (-3dB)
Maximum Measurable speed: 60000RPM
Minimum Measurable speed: 1RPM
Data interface: Ethernet
Supported standard: ISO230-7, GBT17421.7
Output: Radial motion error (total error, synchronization error, asynchronous error, TIR); axial motion error (total error, synchronization error, asynchronous error, TIR); Tilt Error, FFT Analysis, Thermal Analysis, Rotational Speed etc.